The University of Arizona

University Spectroscopy and Imaging Facilities

Ultra-High Resolution Field Emission-SEM S-4800

s4800

Overview

(information taken from the Hitachi web site)

" The Hitachi S-4800 is a truly versatile platform comprising impressive high resolution performance, advanced detection technology, and a user interface that makes it possible to capture even the most short lived moments accurately and clearly.

It employs a semi-in-lens design for large sample accommodation while achieving ultra-high resolution comparable to performance only available with in-lens UHR SEMs.

Features

A new objective lens design with "Super ExB Filter" technology. Using a single detector, the Super ExB Filter collects and separates the various components of pure SE, compositional SE and BSE electron signals.

A guaranteed resolution of 1.4 / 2.0 nm at 1kV (deceleration / standard mode) for low voltage applications.

Type II specimen stage for large sample applications with 110mm x 110mm stage movement and computer controlled 5 axes motorization with graphical interface software.

Advanced dry vacuum system design including Turbo Molecular Pump (TMP).

A new GUI design developed in consultation with users making the S-4800 the most advanced, user friendly UHR SEM available today."

Specifications

Secondary electron image resolution

1.0nm (at 15kV)
1.4nm (at 1kV, deceleration mode)
2.0nm (at 1kV, standard mode)

Electron optics

 

Electron gun

Cold field emission electron source

Acc. voltage

0.5 - 30kV (variable at 0.1kV/step)

Magnification

X 20 - X 800.000

Objective aperture

4 opening, selectable and alignable outside the vacuum (Heater built-in)

Detectors

Secondary electron detector (upper/lower/upper + lower),
(noise compensation using a beam monitor),
(signal control function)
Transmitted electron detector
Energy dispersive X-ray detector

Specimen stage

Type II
X: 0 ~ 110 mm

Y: 0 ~ 110mm

Z: 1.5 ~ 40mm

Tilt: -5  +70 degrees

Rotation: 360 degrees

Drive:

PC controlled 5 axes motor drive

Image display

 

Operation/display

PC/AT compatible, OS: Windows XP
19" Flat panel display

Scan mode

Normal, Split/dual mag./line scan, position
set, spot, AAF, SAA, oblique

Frame memory

640 x 480 pixels, 1,280 x 960 pixels,
2,560 x 1,920 pixels, 5,120 x 3,840 pixels

Image processing

Image processing software, image filing software built-in

Image file format

BMP, TIFF, JPEG selectable

Scan speed

TV, slow (0.5 ~ 40 s/frame) for viewing
Slow (40 ~ 320 s/frame) for recording

Image processing

Automatic image brightness & contrast,
raster rotation, autofocus, auto-stigmation,
averaging, frame integration, color display

Auto data recording

Film numbering, acc. voltage, micron bar
with a scale, magnification, date, hours and
working distance

Electrical image shift

+/-12 um (at W.D. = 8mm)

Vacuum system

Fully automated pneumatic valve control
Energy saving ECO mode
lon pumps 3 sets
TMP 1 set
RP 1 set

S-4800

Options - Thermo

(information taken from the Thermo Scientific web site)

NanoTrace LN-Cooled Si(Li) Detector

The no compromises solution to high sensitivity,
high resolution X-ray detection:

detectorExcellent low energy performance

ISO 15632 compliance

Guaranteed performance on the electron microscope:

    * Mn resolution down to 129 eV

    * F resolution down to 65 eV

    * C resolution down to 62 eV

  • Dewar capacities is 10 liters

Light element detection down to beryllium

"Thermo Scientific: The Spectral Imaging Brand
Over the past years, we have placed collecting and analyzing Spectral Imaging data at the core of the NORAN System SIX Microanalysis System. While others have developed look-alike features, only Thermo has developed a set of tools exclusively designed for Spectral Imaging data.

Automated Acquisition Parameters -- Eliminates guesswork and trial-and-error data collection

Quantitative X-ray Mapping -- Produces richer elemental distribution data

COMPASS -- Multivariate statistical analysis software producing "pure" components

Xphase -- Analyzes X-ray data to produce phase distributions

Spectral Match -- Matches spectral data with known alloys and compounds

When combined, these tools present a comprehensive analysis of the sample's composition, not just in terms of elemental distribution (x-ray maps), but as a complete representation of the sample's composition including the identification of compounds and alloys.

Introducing Direct-to-Phase
Using these advanced algorithms, Direct-to-Phase extracts and displays known phases while the data is still being collected. Now you can allow your EDS system to decide when sufficient statistics have been collected, or you can visualize the data as it develops.

Direct-to-Phase combines Thermo's advancements in Spectral Imaging analysis to produce the most comprehensive tool for understanding your sample's composition. Direct-to-Phase does much more than simply present elemental data in maps and spectra. It develops an information-rich picture of your sample's composition. And it produces complete data ten times faster than current X-ray microanalysis technology.


Research and Industrial Clients - Contact Us

Call Us

David Bentley: 520-621-5097, dlb@u.arizona.edu

Gary Chandler: 520-621-6078, gwc@u.arizona.edu


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